3D Laser Scanning Confocal MicroscopeVK-X series

VK-X250K

Controller

SPECIFICATIONS

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Model

VK-X250K

Total magnification

Up to 28000×*1

Field of view (minimum range)

11 to 5400 µm

Frame rate

Laser measurement speed

4 to 120 Hz, 7900 Hz*2

Measurement principles

Optical system

Pinhole confocal optical system

Height measurement

Linear scale

0.5 nm

Repeatability σ

20×: 40 nm, 50×: 12 nm, 150×: 12 nm *3

Memory for Z-axis measurement

14 million steps

Accuracy

0.2 + L/100 μm or better*3*4

Width measurement

Display resolution

1 nm

Repeatability 3σ

20×: 100 nm, 50×: 40 nm, 150×: 20 nm*3

Accuracy

±2%*3

XY stage configuration

Manual: Operating range

70 mm×70 mm

Motorized: Operating range

50 × 50 mm, 100 × 100 mm*5

Observation

Maximum capture resolution

3072×2304

Weight

Microscope

Approx. 26 kg (without sensor head, approx. 10 kg)

Controller

Approx. 11 kg

*1 With a 23-inch monitor.
*2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 μm.
*3 When measuring the reference scale with the 20× objective lens (or higher) at an ambient temperature of 20 ± 2 °C. With the exception of the VK-X120/X130 with the 100× objective lens.
*4 L = Vertical measurement length in μm
*5 With a motorised stage.

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