Wide-Area 3D Measurement System

VR-3000 series

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Model

VR-S200*1

Travel speed

10mm/sec(max)

Travel range

184×88mm

Stage size

Top surface: 215 x 165 mm (rotary plate: ø140 mm)

Weight

6.5 kg

*1 Optional item for VR-3100 and VR-3050.

Model

VR-3200

VR-3100

VR-3050

Type

Head

Applicable controller

VR-3000K

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24 mm

Vertical

18 mm

Magnification on a
15" monitor 25x

Horizontal

12 mm

Vertical

9 mm

Magnification on a
15" monitor 38x

Horizontal

8 mm

Vertical

6 mm

Magnification on a
15" monitor 50x

Horizontal

Vertical

4.5 mm

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm

-

Vertical

5.7 mm

Magnification on a
15" monitor 80x

Horizontal

3.8 mm

Vertical

2.9 mm

Magnification on a
15" monitor 120x

Horizontal

2.5 mm

Vertical

1.9 mm

Magnification on a
15" monitor 160x

Horizontal

Vertical

1.4 mm

Zoom

1x to 4x

Measurable height

Wide-field mode:10 mm (±5 mm) High magnification mode:1 mm(±0.5 mm)*1

Wide-field mode:10 mm (±5 mm)*1

Reference scale

0.1 μm*2

0.1 µm*2

0.5 μm*2

Repeatability(σ)

Height measurement

0.5 µm*3

0.5 μm*3

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3

Wide-field mode:1 µm High magnification mode:0.5 µm*3

Wide-field mode:1 μm*3

Measurement
accuracy

Height measurement

±3 µm*4

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm*4

Wide-field mode: ±5 µm*4

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*5
Auto adjustment, Auto template analysis*5

Manual (XY, Z)*5

Stage

XY stroke

184 x 88 mm (electric)

70 mm*7(Up to 270 mm*8) (manual)

Z stroke

90 mm (electric)

90 mm(electric)

88 mm(manual)

Rotation

±180°(sample rotating stage)

±90°(θ stage)

Tilt

±30° or more

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)

LED ring light (white)

Measurement light source

White LED

Image size

1024 x 768 pixels, 2048 x 1536 pixels

Data processing

Control PC (OS: Windows 7)*6

Power source

Supply voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature for use

15 to 30°C

Relative humidity for use

35 to 80% RH (no condensation)

Weight

28.0 kg

22.5 kg

20.6 kg

*1 Low magnification ±5 mm and high magnification ±0.5 mm around the focal point position.
*2 Measurement resolution on the Z-axis (height).
*3 When measured in height 20 times measurement mode/width 20 times measurement mode with the KEYENCE calibration standard.
*4 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C).
*5 The stitching module (VR-H2J) is required.
*6 Windows 7 Professional and Ultimate.
*7 The VR-3050 requires the XYθ stage (OP-87715, sold separately).
*8 When the OP-87717 manual slider for stitching is used.

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