3D Optical Profilometer

VR-6000 series

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3D Optical Profilometer Controller VR-6000

VR-6000 - 3D Optical Profilometer Controller

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

  • CE Marking
  • CSA

Specifications

Model

VR-6000

Type

Controller

Head

VR-6200, VR-6100

Field of view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm

Vertical

18.0 mm

Magnification on a 15" monitor 25×

Horizontal

12.0 mm

Vertical

9.0 mm

Magnification on a 15" monitor 38×

Horizontal

8.0 mm

Vertical

6.0 mm

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm

Vertical

5.7 mm

Magnification on a 15" monitor 80×

Horizontal

3.8 mm

Vertical

2.9 mm

Magnification on a 15" monitor 120×

Horizontal

2.5 mm

Vertical

1.9 mm

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm

Zoom

1× to 4×

Height measurement

Display resolution

0.1 μm

Height measurement range

Without Z stitching

Low magnification (wide field of view): 10 mm
High magnification (high resolution): 1 mm

With Z stitching

Low magnification (wide field of view): 50 mm
High magnification (high resolution): 30 mm

Repeatability (σ)

Without Z stitching

0.4 μm *1

With Z stitching

1.0 μm *1

Measurement accuracy

Without Z stitching

±2.5 μm *1

With Z stitching

±4.0 μm *1

Width measurement

Repeatability (σ)

Low magnification (wide field of view): 1 μm
High magnification (high resolution): 0.5 μm
*1

Measurement accuracy

Low magnification (wide field of view): ±5 μm
High magnification (high resolution): ±2 μm
*1

Stitching function

VR-6200: Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting *2
VR-6100: Manual measurement (XY manual operation + Z automatic control) *2

Stitching function

Motorised rotational unit

VR-6200: Supported *2
VR-6100: Not supported

XY measurable range

VR-6200: 300 × 150 mm *2
VR-6100: 92 × 86 mm *2

Stage

XY stroke

VR-6200: 278 × 134 mm (motorised)
VR-6100: 70 × 70 mm (manual)

Z stroke

69 mm (motorised)

Load capacity

4.5 kg

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens × 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30°C

Relative humidity

20 to 80% RH (no condensation)

Weight

Approx. 4 kg

*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C)
*2 Measurement expansion module (VR-H4J) required

Data Sheet (PDF) Other Models