IM-6120
[Wide-field Model]
IM-6025/6015
[General-purpose Model]
IM-6140
[High-precision Model]
Field of view φ100×200mm
☐25×125mm
φ100mm
φ25mm
φ6mm
Repetition accuracy W/o stage movement:
±1 μm
With stage movement:
±2 μm
W/o stage movement:
±0.5 μm
With stage movement:
±1.5 μm
±1μm
±0.5μm
±0.1μm
Illumination system
Automatic height adjustment