Image Dimension Measuring SystemIM-6000 series

IM-6225T

Heads with the contact height measurement unit

SPECIFICATIONS

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Model

IM-6225T

Type

Head

Image sensor

1" 6.6 mega pixel monochrome CMOS

Display

10. 4" LCD monitor (XGA: 1024 × 768)
External monitor connectable (clone output)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide field: ø100 × L200 mm, High precision: 25 × L125 mm

Minimum display unit

0.1 µm

Repeatability

W/o stage movement

Wide field: ±1 µm, High precision: ±0. 5 µm

With stage movement

Wide field: ±2 µm, High precision: ±1. 5 µm

Measurement accuracy (±2σ)

W/o binding

Wide field: ±5 µm*1, High precision: ±2 µm*2

With binding

Wide field: ±(7 + 0. 02 L) µm*3, High precision: ±(4 + 0. 02 L) µm*4

Height measurement

Measuring range

0 to 60 mm

Measurement force

0.3 N

Measurement position accuracy (XY)

±0.7 mm

Minimum display unit

1 µm

Measurable area (XY)

Standard probe

Wide field: 45 × 95 mm, High precision: 7.5 × 25 mm

Wide-range probe

Wide field: 95 × 95 mm, High precision: 60 × 25 mm

Repetition accuracy

Standard probe

±2 µm*5

Wide-range probe

±5 µm*5

Measurement accuracy

Standard probe

±7.5 µm*6

Wide-range probe

±15 µm*6

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

Relay output/rated load: 24 VDC, 0. 5 A/ON resistance

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

250 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)

X stage

Moving range

100 mm (electric)

Z stage

30 mm (electric)

Withstand load

2 kg

Power supply

Power voltage

100 to 240 VAC 50/60 Hz

Power consumption

310 VA max.

Environmental resistance

Operating ambient temperature

+10°C to 35°C

Operating ambient humidity

20% RH to 80% RH (no condensation)

Weight

Approx. 34 kg

*1 In the range of ø80 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position
*2 In the range of ø20 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position
*3 In the range of ø80 × 180 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of ø20 × 120 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units)
*5 When the maximum measurement height is set to 30 mm or less; ±3 µm for the standard probe and ±6 µm for the wide-range probe when the maximum measurement height is greater than 30 mm and less than or equal to 60 mm
*6 When the maximum measurement height is set to 30 mm or less; ±12 µm for the standard probe and ±21 µm for the wide-range probe when the maximum measurement height is greater than 30 mm and less than or equal to 60 mm

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