Ultra-High-speed, High-accuracy Optical MicrometerLS-9000 series


Sensor Head With Monitor Function


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with monitor camera

Measurement range

0.04 mm (0.01 mm) to 6 mm

Smallest detectable object

0.04 mm (0.01 mm)

Transmitter/receiver distance

60 ±5 mm


±0.03 µm*2

Measurement accuracy

±0.5 µm*3

Sampling cycle

16,000 samples/sec.*4

Transmitter/receiver direction and position detection

Detection area

4 × 5 mm

Smallest detectable object

0.04 mm


±0.02 mm *5

Sampling cycle

4,000 samples/sec.

Light source

InGaN green LED

Monitor camera



Current consumption

with monitor camera

Environmental resistance

Operating ambient temperature

0 to +50°C

Operating ambient humidity

20 to 85% RH (no condensation)

Operating ambientluminance

Incandescent lamp/fluorescent lamp 3,000 lux or lower


10 to 55 Hz, double amplitude 1.5 mm 2 hours in each direction (X,Y, and Z)

Shock resistance

15G/6 ms

Enclosure rating

IP67 (including connector)




Transmitter: Approx 130 g
Receiver: Approx 300 g
Base: Approx 180 g

*1 The values in brackets are measured in ultra-thin mode.
*2 A ±2σ margin of error when measuring a ø1.0 mm rod in the centre of the measurement area using outer diameter mode with the average measurement number set as 2048 times.
*3 Margin of error when a moving ø1.0 mm rod is measured in the 2 mm × 4 mm measurement area using outer diameter mode.
*4 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
*5 The value of ±2 when the position of a rod o1.0 mm is measured at the center of the measuring area while the number of averaging measurements is set to 512.

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