Spectral Interference Reflection Method
SI Series

SI Series

To measure warpage, measurement instruments that enforce the spectral interference method are used for detection at three points. The measured value of each point is then sent to a controller, where calculations are performed to return the measurement.

Point of selection

  • Ultra-high accuracy with 1 nm resolution
  • Unaffected by ambient temperature
SI-F Series
Spectral Interference Laser Displacement Sensor
SI-F Series