Spectral Interference Method
SI Series

SI Series

The stroke amount is measured using measurement instruments that enforce the spectral interference method.
Sensor heads are as small as φ2 mm, allowing measurement even in narrow locations is possible.

Point of selection

  • Ultra-high accuracy with 1 nm resolution
  • Unaffected by ambient temperature
SI-F Series
Spectral Interference Laser Displacement Sensor
SI-F Series