3D Laser Scanning Confocal MicroscopeVK-X series

VK-X1000

controller

SPECIFICATIONS

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Model

VK-X1000

Type

controller

Total magnification

Up to 28,800 x*1

Field of view (minimum range)

11 to 7,398 µm

Frame rate (laser measurement speed)

4 to 125 Hz, 7,900 Hz*2

Measurement principle

Optical system

Pinhole confocal optical system, Focus variation

Light-receiving element

16-bit sensing: photomultiplier, High-definition colour CMOS

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan)

Height measurement

Display resolution

0.5 nm (VK-X1100) , 5 nm (VK-X1050)

Linear scale

Dynamic range

16 bits

Repeatability σ

Laser confocal

20 x, 40 nm; 50 x, 12 nm (VK-X1100)
20 x, 40 nm; 50 x, 20 nm (VK-X1050)

Focus variation

5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 20 nm (VK-X1100)
5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 30 nm (VK-X1050)

Height data acquisition range

0.7 million steps

Accuracy

0.2 + L /100 µm or better*3

Width measurement

Display resolution

1 nm (VK-X1100) , 10 nm (VK-X1050)

Repeatability 3σ

Laser confocal

20 x, 100 nm; 50 x, 40 nm (VK-X1100)
20 x, 100 nm; 50 x, 50 nm (VK-X1050)

Focus variation

5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 50 nm (VK-X1100)
5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 65 nm (VK-X1050)

Accuracy

±2 %*3

XY stage configuration

Manual: Moving range

70 mm x 70 mm

Motorised: Moving range

100 mm x 100 mm

Observation

Image options

High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image)

Illumination

Ring illumination, coaxial illumination

Laser light source for measurements

Wavelength

Violet semiconductor laser, 404 nm (VK-X1100)
Red semiconductor laser, 661 nm (VK-X1050)

Maximum output power

1 mW

Laser class

Class 2 laser product (IEC60825-1)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Current consumption

150 VA

Weight

Approx. 3.0 kg

*1 23 inch full-screen display.
*2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm.
*3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher).

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