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          3D Laser Scanning Confocal MicroscopeVK-X series

          VK-X150K

          Controller

          [Discontinued model]

          This model has been discontinued.

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          SPECIFICATIONS

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          Model

          VK-X150K

          Total magnification

          Up to 19200×*1

          Field of view (minimum range)

          16 to 5400 µm

          Frame rate

          Laser measurement speed

          4 to 120 Hz, 7,900 Hz*2

          Measurement principles

          Optical system

          Pinhole confocal optical system

          Height measurement

          Linear scale

          5 nm

          Repeatability σ

          20×: 40 nm, 50×: 20 nm, 100×: 20 nm *3

          Memory for Z-axis measurement

          1.4 million steps

          Accuracy

          0.2 + L/100 µm or better*4*5

          Width measurement

          Display resolution

          10 nm

          Repeatability 3σ

          20×: 100 nm, 50×: 50 nm, 100×: 30 nm*3

          Accuracy

          ±2%*3

          XY stage configuration

          Manual: Operating range

          70 mm×70 mm

          Motorized: Operating range

          50 × 50 mm, 100 × 100 mm*6

          Observation

          Maximum capture resolution

          3072×2304

          Weight

          Microscope

          Approx. 25 kg (without sensor head, approx. 8.5 kg)

          Controller

          Approx. 11 kg

          *1 With a 23-inch monitor.
          *2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm.
          *3 When measuring the reference scale with the 20× objective lens (or higher) at an ambient temperature of 20 ± 2 °C. With the exception of the VK-X120/X130 with the 100× objective lens.
          *4 When measuring the reference scale with the 20x objective lens (or higher) at an ambient temperature of 20 ±2 °C. With the e x ception of the VK-X120/X130 with the 100x objective lens.
          *5 L = Vertical measurement length in µm
          *6 With a motorised stage.

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