3D Laser Scanning Confocal Microscope

VK-X series

System Configuration

VK Laser Scanning Microscope Options

Adjustable-height Stand for the VK Series

A highly-rigid, adjustable-height stand attaches to the back of the VK microscope, allowing the measuring head to be adjusted to any height. Inserting a spacer between the measuring head and the base improves the stability and enables high accuracy measurement.

Objective Lenses: A large selection of lenses are available, including high N.A., APO, long focal distance, and low magnification lenses.

300 mm Wafer Stage: An entire wafer can be examined and analysed. Easy-to-mount design.

Motorised Stage: The motorised stage is essential to automatic image assembly and programmable operation. Easy-to-mount design.

Separate Measuring Head: Non-destructive examination and analysis of any point on large-sized targets by mounting the head on a 3rd-party stage.

ISO 25178
Surface texture measurement module VK-H1XR

This software module complies with ISO 25178 and allows users to complete measurements of several surface parameters. Parameters that can be measured include height, spatial, hybrid, functional, and functional volume measurements.

2D & 3D Measurement Tools
Analysis Expansion Module VK-H1XP [Optional]

Indentation/Projection Measurement

Divide areas above (projections) or below (indentations) a specified height threshold value into separate zones, and take measurements for each area.

Indentation Measurement: Surface of metal component after processing (3000x)

Projection Measurement: Bump (2000x)

Position Compensation Function [Industry’s First]

When a standard sample has been registered and a different image is opened in a template, the VK-Analyser automatically adjusts the image position so that the image opens at the same position as the registered sample. This function is effective when measuring large sample populations.

Automatic Position Compensation: Wire bonding (1000x)

Height Difference Analysis Function: Analyses the difference between two images as a solid 3D image. Enables surface-based image analysis that can capture minute changes.

Sphere/Surface Angle Measurement

Automatically extracts the radii of circular objects in a specified area. Since the measurements are calculated automatically, this function reduces variations in measurements between users.

Sphere Measurement: Microlens (1000x)

Particle Analysis Module VK-H1XG [Optional]: Automatically counts and measures circular objects within the microscope field. Preprocessing such as automatic separation of adjacent particles, counting, diameter, etc can be performed.