Wide-Area 3D Measurement SystemVR series

VR-5200

Wide-Area 3D Measurement System Head

SPECIFICATIONS

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Model

VR-5200

Type

Head

Controller

VR-5000

Field-of-view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm

Vertical

18.0 mm

Magnification on a 15" monitor 25×

Horizontal

12.0 mm

Vertical

9.0 mm

Magnification on a 15" monitor 38×

Horizontal

8.0 mm

Vertical

6.0 mm

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm

Vertical

5.7 mm

Magnification on a 15" monitor 80×

Horizontal

3.8 mm

Vertical

2.9 mm

Magnification on a 15" monitor 120×

Horizontal

2.5 mm

Vertical

1.9 mm

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm

Zoom

1× to 4×

Height measurement

Display resolution

0.1 µm

Height measurement range

Without Z stitching

Low magnification (wide field of view) : 10 mm
High magnification (high resolution) : 1 mm

With Z stitching

Low magnification (wide field of view) : 50 mm
High magnification (high resolution) : 30 mm

Repeatability (σ)

Without Z stitching

0.4 µm*1

With Z stitching

1.0 µm*1

Measurement accuracy

Without Z stitching

±2.5 µm*1

With Z stitching

±4.0 µm*1

Width measurement

Repeatability (σ)

Low magnification (wide field of view) : 1 µm
High magnification (high resolution) : 0.5 µm
*1

Measurement accuracy

Low magnification (wide field of view) : ±5 µm
High magnification (high resolution) : ±2 µm
*1

Stitching function

Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting*2

XY measurable range

206 x 104 mm*2

Stage

XY stroke

184 x 88 mm (motorised)

Z stroke

73 mm (motorised)

Load capacity

4.5 kg

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens x 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Operating ambient temperature

+15 to 30 °C

Operating ambient humidity

35 to 80 % RH (no condensation)

Weight

Approx. 28 kg*3

*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C )
*2 Measurement expansion module (VR-H3J) required
*3 Weight of only measurement unit: Approx. 11 kg

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