Surface Roughness Measuring Instruments
Various measurement tools are available in the market for analyzing and evaluating surface roughness and shape.
This section introduces the principles and characteristics of typical contact-type measuring instruments (surface roughness tester and atomic force microscope) and non-contact type measuring instruments (white light interferometer and laser scanning microscope).
|Method||Contact type||Non-contact type|
|Atomic force microscope
|Measurement resolution||1nm||< 0.01 nm||< 0.1 nm||0.1nm|
|Height measurement range||up to 1 mm
up to 0.04"
|< 10 μm
< 0.39 Mil
|< a few mm
< a few fractions of an inch
|< 7 mm
|Measurable range||a few mm
a few fractions of an inch
|1 to 200 μm
0.04 to 7.87 Mil
|40 μm to 15 mm
1.57 Mil to 0.59"
|15 μm to 2.7 mm
0.59 Mil to 0.11"
|Measurement site positioning||–||Optional||Built-in optical camera||Built-in optical camera|
|Damage to samples||Contact||Contact||Non-contact||Non-contact|