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Profile-Measuring Laser Microscopes

3D laser scanning microscope

A 3D laser scanning microscope is an observation/measuring equipment that enables both the 3D measurement and deep focus depth observation at the same time. It has no restrictions on the size or material of a sample and allows for observation under normal environmental conditions. In addition, the 3D laser scanning microscope features user-friendly operability similar to that of an optical microscope. Samples do not need pretreatment before measurement. Observation can be done in colour, which helps accurate analysis of the conditions of the target object. A 3D laser scanning microscope can also be used for measuring the thickness of films, as well as for observing the surface, inside, and back side of a translucent object.

While the 3D laser scanning microscope is better than a scanning electron microscope or an atomic force microscope in terms of operability, it is inferior in observation magnification and measurement resolution. Bottom parts with high aspect ratio and slopes with large angles cannot be measured or observed, because they do not reflect the laser beam.

Advantages Disadvantages
  • - Deep depth of focus
  • - Target object can be observed in colour
  • - Produces 3D profiles and displays colour 3D images.
  • - Capable of measuring film thickness of translucent objects such as resist for semiconductor fabrication
  • - Analysis in atmospheric conditions is possible, not needing pretreatment of sample
  • - No limitation on sample size and material; Easy operation makes for excellent general-purpose use.
  • -Incapable of high-definition observation and high-precision measurement (below 1 nm)
  • - Information of the surfaces of the sample that do not receive laser beam emission (such as the sides) cannot be acquired
  • - Incapable of measuring materials that absorb laser beam wavelength

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