3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Measurement unit VK-X160K

VK-X160K - Measurement unit

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Specifications

Model		VK-X160K
Total magnification		Up to 19200×^*1
Field of view (minimum range)		16 to 5400 µm
Frame rate	Laser measurement speed	4 to 120 Hz, 7,900 Hz^*2
Measurement principles	Optical system	Pinhole confocal optical system
Height measurement	Linear scale	5 nm
	Repeatability σ	20×: 40 nm, 50×: 20 nm, 100×: 20 nm ^*3
	Memory for Z-axis measurement	1.4 million steps
	Accuracy	0.2 + L/100 µm or better^4^5
Width measurement	Display resolution	10 nm
	Repeatability 3σ	20×: 100 nm, 50×: 50 nm, 100×: 30 nm^*3
	Accuracy	±2%^*3
XY stage configuration	Manual: Operating range	70 mm×70 mm
	Motorized: Operating range	50 × 50 mm, 100 × 100 mm^*6
Observation	Maximum capture resolution	3072×2304
Weight	Microscope	Approx. 25 kg (without sensor head, approx. 8.5 kg)
	Controller	Approx. 11 kg
^1 With a 23-inch monitor. ^2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. ^3 When measuring the reference scale with the 20× objective lens (or higher) at an ambient temperature of 20 ± 2 °C. With the exception of the VK-X120/X130 with the 100× objective lens. ^4 When measuring the reference scale with the 20x objective lens (or higher) at an ambient temperature of 20 ±2 °C. With the e x ception of the VK-X120/X130 with the 100x objective lens. ^5 L = Vertical measurement length in µm ^6 With a motorised stage.