Controller VK-X3000

VK-X3000 - Controller

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model		VK-X3000
Type		Controller
Total magnification		42× to 28800×^*1
Field of view		11 to 7398 μm
Measurement principle		Laser confocal, Focus variation, White light interferometry, Spectral interference
Laser wavelength		VK-X3100: Semiconductor laser, 404 nm VK-X3050: Semiconductor laser, 661 nm
Max. laser measurement speed		Surface: 125 Hz, Line: 7900 Hz^*2
Max. laser output		1.0 mW
Laser class		Class 2 (IEC60825-1)
Laser light-receiving element		16-bit photomultiplier
White light source		White LED
White-light-receiving element		High-definition colour CMOS
Laser confocal	Height display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Height repeatability σ	VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm
	Height accuracy	0.2+L/100 μm or less^*3
	Width display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Width repeatability 3σ	VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm
	Width accuracy	Measured value ±2% or less^*3
Focus variation	Height display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Height repeatability σ	VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm
	Height accuracy	0.2+L/100 μm or less^*3
	Width display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Width repeatability 3σ	VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm
	Width accuracy	Measured value ±2% or less^*3
White light interferometry	Height display resolution	0.01 nm
	Width display resolution	0.1 nm
	Surface topography repeatability	0.08 nm^*4
	Repeatability of RMS	0.008 nm^*4
Spectral interference film thickness measurement	Repeatability σ	0.1 nm^*4
	Accuracy	±0.6%^*4
Optical observation	Number of pixels	5.6 million
	Revolver	6-hole electric revolver
	Ring illumination lens	2.5×, 5×, 10×
	Optical zoom	1 to 8×
XY stage configuration	Manual operation range	70 mm × 70 mm
	Motorised operation range	100 mm × 100 mm
Power supply	Power voltage	100 to 240 VAC, 50/60 Hz
	Power consumption	150 VA
Environmental resistance	Ambient temperature	+15 to 28°C
	Relative humidity	20 to 80% RH (No condensation)
Weight		Approx. 3 kg
^1 When using a 23-inch full-screen display. ^2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm. ^3 When measuring a standard sample with a 20× or greater lens. ^4 Typical values under the default measurement environment.

Data Sheet (PDF) Other Models