High-speed exposure is used so that a precise inspection of the target can be performed even if the target is vibrating, making accurate measurement possible.
By integrating the peripheral circuits of the measurement CMOS into one chip, the S/N ratio has been dramatically improved and high-speed sampling achieved. For example, targets that move at 1,000 m/min. can be measured at a pitch of around 1 mm. Even parts that vibrate at high speeds can be measured stably.