Ultra-High-speed, High-accuracy Optical MicrometerLS-9000 series


Head: 2-axis small-diameter model without monitor camera


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Head: 2-axis standard model

Measurement range

ø0.04 mm to ø6 mm

Smallest detectable object

0.04 mm


±0.03 µm*1

Measurement accuracy

±0.5 µm*2

Sampling cycle

16,000 samples/sec.*3

Light source

InGaN green LED

Monitor camera

Not provided

Environmental resistance

Enclosure rating

IP67 (including connector part)

Ambient light

Incandescent lamp/Fluorescent lamp: 3,000 lux or lower

Ambient temperature

0 to +50 °C

Relative humidity

20 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 1.5 mm, 2 hours in each of the X, Y, and Z directions

Shock resistance

15 G/6 ms




Approx. 4.8 kg

*1 A ±2σ margin of error when measuring a ø1.0 mm rod in the centre of the measurement area using outer diameter mode with the average measurement number set as 2,048 times.
*2 Margin of error when a moving ø1.0 mm rod is measured in the 2 mm x 2 mm measurement area.
*3 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.

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