3D Laser Scanning Confocal MicroscopeVK-X series

VK-X1050

Measurement head: Red semiconductor laser

SPECIFICATIONS

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Model

VK-X1050

Type

measurement head

Total magnification

Up to 28,800 x*1

Field of view (minimum range)

11 to 7,398 µm

Frame rate (laser measurement speed)

4 to 125 Hz, 7,900 Hz*2

Measurement principle

Optical system

Pinhole confocal optical system, Focus variation

Light-receiving element

16-bit sensing: photomultiplier, High-definition colour CMOS

Scanning method (during general measurement and image stitching)

Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan)

Height measurement

Display resolution

5 nm

Linear scale

Dynamic range

16 bits

Repeatability σ

Laser confocal

20 x, 40 nm; 50 x, 20 nm

Focus variation

5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 30 nm

Height data acquisition range

0.7 million steps

Accuracy

0.2 + L /100 µm or better*3

Width measurement

Display resolution

10 nm

Repeatability 3σ

Laser confocal

20 x, 100 nm; 50 x, 50 nm

Focus variation

5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 65 nm

Accuracy

±2 %*3

XY stage configuration

Manual: Moving range

70 mm x 70 mm

Motorised: Moving range

100 mm x 100 mm

Observation

Image options

High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image)

Illumination

Ring illumination, coaxial illumination

Laser light source for measurements

Wavelength

Red semiconductor laser, 661 nm

Maximum output power

1 mW

Laser class

Class 2 laser product (IEC60825-1)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Current consumption

150 VA

Weight

Approx. 13.0 kg

*1 23 inch full-screen display.
*2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm.
*3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher).

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