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          Wide-Area 3D Measurement SystemVR series

          VR-5000

          Wide-Area 3D Measurement System Controller

          SPECIFICATIONS

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          Model

          VR-5000

          Type

          Controller

          Head

          VR-5200, VR-5100

          Field-of-view

          Low magnification (wide field of view)

          Magnification on a 15" monitor 12×

          Horizontal

          24.0 mm

          Vertical

          18.0 mm

          Magnification on a 15" monitor 25×

          Horizontal

          12.0 mm

          Vertical

          9.0 mm

          Magnification on a 15" monitor 38×

          Horizontal

          8.0 mm

          Vertical

          6.0 mm

          Magnification on a 15" monitor 50×

          Horizontal

          Vertical

          4.5 mm

          High magnification (high resolution)

          Magnification on a 15" monitor 40×

          Horizontal

          7.6 mm

          Vertical

          5.7 mm

          Magnification on a 15" monitor 80×

          Horizontal

          3.8 mm

          Vertical

          2.9 mm

          Magnification on a 15" monitor 120×

          Horizontal

          2.5 mm

          Vertical

          1.9 mm

          Magnification on a 15" monitor 160×

          Horizontal

          Vertical

          1.4 mm

          Zoom

          1× to 4×

          Height measurement

          Display resolution

          0.1 µm

          Height measurement range

          Without Z stitching

          Low magnification (wide field of view) : 10 mm
          High magnification (high resolution) : 1 mm

          With Z stitching

          Low magnification (wide field of view) : 50 mm
          High magnification (high resolution) : 30 mm

          Repeatability (σ)

          Without Z stitching

          0.4 µm*1

          With Z stitching

          1.0 µm*1

          Measurement accuracy

          Without Z stitching

          ±2.5 µm*1

          With Z stitching

          ±4.0 µm*1

          Width measurement

          Repeatability (σ)

          Low magnification (wide field of view) : 1 µm
          High magnification (high resolution) : 0.5 µm
          *1

          Measurement accuracy

          Low magnification (wide field of view) : ±5 µm
          High magnification (high resolution) : ±2 µm
          *1

          Stitching function

          VR-5200: Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting
          VR-5100: Manual measurement (XY manual operation + Z automatic control)
          *2

          XY measurable range

          VR-5200: 206 x 104 mm
          VR-5100: 92 x 86 mm
          *2

          Stage

          XY stroke

          VR-5200: 184 x 88 mm (motorised)
          VR-5100: 70 x 70 mm (manual)

          Z stroke

          73 mm (motorised)

          Load capacity

          4.5 kg

          Working distance

          75 mm

          Image receiving element

          4 megapixel monochrome CMOS

          Transmitter lens

          Double-telecentric lens x 2

          Receiver lens

          Double-telecentric lens

          Light sources

          Observation light source

          LED ring light (red, blue, green)

          Measurement light source

          White LED

          Data processing

          Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

          Power supply

          Power voltage

          100 to 240 VAC, 50/60 Hz

          Power consumption

          200 VA max.

          Environmental resistance

          Operating ambient temperature

          +15 to 30 °C

          Operating ambient humidity

          35 to 80 % RH (no condensation)

          Weight

          Approx. 4 kg

          *1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C )
          *2 Measurement expansion module (VR-H3J) required

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