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          Image Dimension Measurement SystemIM-7000 series

          IM-7500

          Controller

          SPECIFICATIONS

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          Model

          IM-7500

          Type

          Controller

          Image sensor

          1” 6.6 mega pixel monochrome CMOS

          Display

          10. 4” LCD monitor (XGA: 1024 × 768)

          Receiver lens

          Double telecentric lens

          Image measurement

          Field of view

          Wide-field measurement mode

          [IM-7010] 200 mm × 200 mm (4× R50)
          [IM-7020] 200 mm × 200 mm (4× R50)
          [IM-7030] 300 mm × 200 mm (4× R50)

          High-precision measurement mode

          [IM-7010] 125 × 125 mm
          [IM-7020] 125 × 125 mm
          [IM-7030] 225 × 125 mm

          Minimum display unit

          0.1 µm

          Repeatability

          Wide-field
          measurement mode

          W/o stage movement

          ±1 µm

          With stage movement

          ±2 µm

          High-precision
          measurement mode

          W/o stage movement

          ±0.5 µm

          With stage movement

          ±1.5 µm

          Measurement
          accuracy (±2σ)

          Wide-field
          measurement mode

          W/o binding

          ±5 µm*1

          With binding

          [IM-7010/IM-7020] ±(7 + 0.02 L) µm*2
          [IM-7030] ±(7 + 0.02 L) µm*3

          High-precision
          measurement mode

          W/o binding

          ±2 µm*4

          With binding

          [IM-7010/IM-7020] ±(4 + 0.02 L) µm*5
          [IM-7030] ± (4 + 0.02 L) µm*6

          Light probe Measurement

          Measurable area (XY)

          [IM-7010] -
          [IM-7020] 90 × 90 mm
          [IM-7030] 190 × 90 mm

          Maximum measurement depth

          [IM-7010] -
          [IM-7020] 30 mm
          [IM-7030] 30 mm

          Light probe diameter

          [IM-7010] -
          [IM-7020] ø3 mm
          [IM-7030] ø3 mm

          Measuring force

          [IM-7010] -
          [IM-7020] 0.015 N
          [IM-7030] 0.015 N

          Repeatability

          [IM-7010] -
          [IM-7020] ±2 µm*7
          [IM-7030] ±2 µm*7

          Measurement accuracy

          [IM-7010] -
          [IM-7020] ±(8 + 0.02 L) µm*8
          [IM-7030] ±(8 + 0.02 L) µm*9

          External remote input

          Non-voltage input (with and without contact)

          External output

          OK/NG/FAIL/MEAS.

          PhotoMos output
          Rated load 24 VDC 0.5 A
          ON resistance 50 mΩ or lower

          Interface

          LAN

          RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

          USB 3.1

          4 ports (rear: 4)

          USB 2.0 series A

          2 ports (front: 2)

          Record

          Hard disk drive

          500 GB

          Illumination system

          Transparent

          Telecentric transparent illumination

          Ring

          [IM-7010] Four division ring illumination
          [IM-7020] Four division, multi-angle illumination (electric) /Slit ring (directivity) illumination (electric)
          [IM-7030] Four division, multi-angle illumination (electric) /Slit ring (directivity) illumination (electric)

          XY stage

          Moving range

          [IM-7010] 100 × 100 mm (electric)
          [IM-7020] 100 × 100 mm (electric)
          [IM-7030] 200 × 100 mm (electric)

          Withstand load

          [IM-7010] 5 kg
          [IM-7020] 5 kg
          [IM-7030] 7.5 kg

          Z stage

          Moving range

          75 mm (electric)

          Power supply

          Power voltage

          100–240 VAC, 50/60 Hz

          Power consumption

          430 VA or lower

          Environmental resistance

          Ambient temperature

          +10°C to 35°C

          Relative humidity

          20% RH to 80% RH (no condensation)

          Weight

          Controller: Approx. 8 kg
          Head: Approx. 30 kg (IM-7010), Approx. 31 kg (IM-7020), Approx. 33 kg (IM-7030)

          *1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
          *2 In the range of 180 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
          *3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
          *4 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
          *5 In the range of 120 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
          *6 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
          *7 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
          *8 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm.
          *9 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm.

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